High Fill Factor Array of Piezoelectric Micromachined Ultrasonic Transducers with Large Quality Factor
نویسندگان
چکیده
منابع مشابه
High Frequency and High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers Based on Cavity Soi Wafers
This paper presents a high frequency and high fill factor piezoelectric micromachined ultrasonic transducer (PMUT) array, which is fabricated with a simple and CMOS compatible process based on commercially available cavity SOI wafers. This 2-mask process eliminates the need for through-wafer etching and enables 10× higher fill factor and thereby higher acoustic performance. PMUTs based on both ...
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ژورنال
عنوان ژورنال: Sensors and Materials
سال: 2020
ISSN: 0914-4935
DOI: 10.18494/sam.2020.2749